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Aspects of Diamond-Like Carbon based MEMS and Microfluidic Devices

Subhadeep Mukhopadhyay

Abstract


In general, diamond-like carbon (DLC) is the hydrogenated amorphous carbon (a-C:H) to be used in the fabrication of micro electromechanical systems (MEMS) and microfluidic devices. Mukhopadhyay as author has recently demonstrated the variation of surface wettability in polymer based microchannels by the use of DLC. Also, DLC can be used as an anti-stiction coating in different applications. In this review, different features of DLC are briefly highlighted. This educational short review is authored as the study material for proposed elective-course on Microfluidics (M.Tech, Theory) in the Department of Mechanical Engineering, National Institute of Technology Arunachal Pradesh, India.

Keywords


Diamond-like carbon, MEMS, Microfluidic device, Coating

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