Open Access Open Access  Restricted Access Subscription or Fee Access

Chemical Processing of SU-8 Photoresist to Record the Surface-Driven Microfluidic Flow of Dyed Working Liquid in the Regime of Fluid Mechanics

Subhadeep Mukhopadhyay

Abstract


Chemical processing of negative photoresist SU-8 is performed to fabricate a set of three individual
SU-8 based glass microfluidic devices inside the cleanroom laboratory. The major steps of SU-8
processing are spin coating using a spin coater, soft baking, ultra-violet (UV) exposure, post exposure
baking, development by SU-8 developer, and hard baking. The indirect bonding for leakage-free
sealing is used during hard baking to fabricate the microfluidic devices. Author has prepared the
dyed water to be used as working liquid. Author has used the CMOS camera to record each capillary
flow of dyed water. Each fabricated device contains the arrays of square micropillars which are
fabricated on the glass bottom wall of device. The filling time of capillary meniscus is lower
corresponding to smaller side length of integrated square micropillars due to lower microfluidic
friction. Leakage-free surface-driven capillary flow is recorded corresponding to each fabricated
device. Nonlinear meniscus profile is recorded in each microfluidic device. The surface-driven
microfluidic flow is generated by thermodynamic reasons according to the published literatures. This
experimental work may be useful for commercial bioengineering applications in future.


Keywords


Chemical processing, indirect bonding, maskless lithography, SU-8; working liquid

Full Text:

PDF

References


Sikanen T, Tuomikoski S, Ketola RA, et al. Characterization of SU-8 for Electrokinetic Microfluidic Applications. Lab Chip. 2005; 5: 888–896p.

Yang SC, Lin YC. Removal of SU-8 Photoresist using Buckling-Driven Delamination Assisted with a Carbon Dioxide Snow Jet for Microfluidics Fabrication. J Micromech Microeng. 2007; 17(12): 2447–2453p.

Nordstrom M, Marie R, Calleja M, et al. Rendering SU-8 Hydrophilic to Facilitate Use in Micro Channel Fabrication. J Micromech Microeng. 2004; 14(12): 1614–1617p.

Mukhopadhyay S, Banerjee JP, Roy SS, et al. Effects of Surface Properties on Fluid Engineering Generated by the Surface-Driven Capillary Flow of Water in Microfluidic Lab-on-a-Chip Systems for Bioengineering Applications. Surf Rev Lett. 2016; 24(3).

Mukhopadhyay S, Roy SS, D'Sa Raechelle A, et al. Nanoscale Surface Modifications to Control Capillary Flow Characteristics in PMMA Microfluidic Devices. Nanoscale Res Lett. 2011; 6(1): 411p.

Mukhopadhyay S, Banerjee JP, Roy SS. Effects of Channel Aspect Ratio, Surface Wettability and Liquid Viscosity on Capillary Flow through PMMA Sudden Expansion Microchannels. Adv Sci Focus. 2013; 1(2): 139–144p.

Mukhopadhyay S. Optimisation of the Experimental Methods for the Fabrication of Polymer Microstructures and Polymer Microfluidic Devices for Bioengineering Applications. J Polym Compos. 2016; 4(3): 8–26p.

Mukhopadhyay S. Experimental Investigations on the Durability of PMMA Microfluidic Devices Fabricated by Hot Embossing Lithography with Plasma Processing for Bioengineering Applications. Emerg Trend Chem Eng. 2016; 3(3): 1–18p.

Mukhopadhyay S. Experimental Investigations on the Effects of Channel Aspect Ratio and Surface Wettability to Control the Surface-Driven Capillary Flow of Water in Straight PMMA Microchannels. Trends Opto-Electro Opt Commun. 2016; 6(3): 1–12p.

Mukhopadhyay S. Report on the Separation Efficiency with Separation Time in the Microfluidic Lab-on-a-Chip Systems Fabricated by Polymers in this 21st Century of 3rd Millennium. J Exp Appl Mech. 2016; 7(3): 20–37p.

Mattia D, Gogotsi Y. Review: Static and Dynamic Behavior of Liquids inside Carbon Nanotubes. Microfluid Nanofluid. 2008; 5(3): 289–305p.

Sparreboom W, Berg AVD, Eijkel JCT. Transport in Nanofluidic Systems: A Review of Theory and Applications. New J Phys. 2010; 12(1): 015004.

Rauscher M, Dietrich S. Wetting Phenomena in Nanofluidics. Annu Rev Mater Res. 2008; 38: 143-172.

Hansen JS, Daivis PJ, Todd BD. Molecular Spin in Nano-Confined Fluidic Flows. Microfluid Nanofluid. 2009; 6: 785–795p.

Squires TM, Quake SR. Microfluidics: Fluid Physics at the Nanoliter Scale. Rev Mod Phys. 2005; 77(3): 977–1026p.


Refbacks

  • There are currently no refbacks.