On-Wafer Calibration of Vector Network Analyzer – Fabrication of LRM Calibration Standard

Abstract

Vector network analyzer or VNA has become ascendant of most measuring networks above 1 GHz. These networks consist of various manufacturing defects (due to resistance, capacitance and inductance) including VNA errors. To measure these errors, VNA was calibrated using a calibration kit. The usage of this calibration kit squanders a lot of time and money; moreover, the results are not accurate. To avoid this, the concept of on-wafer calibration is introduced, wherein calibration patterns are developed on a wafer and hence connected to specially designed RF probes to calibrate VNA.