The Impact of MEMS on the Internet of Things (IoT)

Abstract

Our daily lives, workdays, and connections with the external world are all being impacted by the
Internet of Things (IoT). Micro Electro-Mechanical Systems (MEMS) are tiny, economical, and
pretty accurate sensors that can measure a variety of physical variables, including temperature,
pressure, humidity, acceleration, and more. They are a fundamental enabler of this technology. In
this article, we examine the effects of MEMS on the IoT and the ways in which these incredibly
small sensors are promoting the expansion and advancement of the IoT ecosystem. A huge
number of tiny, cheap, and low-power sensors and actuators are essential to the quick
development of 5th mobile networks (5G) and the Internet of Things (IoT). A adaptable platform
for a collection of high-performance sensors, actuators, energy harvesters, filters, and oscillators
is provided by piezoelectric microelectromechanical system (MEMS) devices made using
micromachining techniques (main building blocks in radio frequency front ends for wireless
communication). The functions, structural layout, and wide range of applications of piezoelectric
MEMS devices are all comprehensively reviewed in this paper. In order to deal with applications
in physical, chemical, and biological sensing, a variety of piezoelectric Mems devices contact
and non-contact—are first described. A discussion of the developments in piezoelectric MEMS
actuators for different application scenarios follows here. Piezoelectric MEMS energy collectors,
that can power other MEMS devices, are methodically listed at present. Lamb wave resonators
are also demonstrated with a variety of performance modifications as a representative of
piezoelectric resonators. Finally, the development tendencies of piezoelectric MEMS devices for
implanted and wearable applications are discussed.