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Development of a Flexure Mechanism for High-Precision Applications in Scanning Applications
Abstract
The utilization of the Planar XY Flexural Mechanism is extensive in precision motion systems, where it induces relative motion between a fixed support and a motion stage through the utilization of material flexibility. In contrast to rigid link mechanisms, this mechanism presents noteworthy advantages, including zero backlash, frictionless motion, and high-order repeatability, all within a considerably more compact form. Notably, flexure mechanisms are characterized by their construction from a single monolith. This research primarily concentrates on modeling the flexural process to achieve precise scanning across a broader range at increased speeds. In the assessment of the motion stage's static deflection, Finite Element Analysis (FEA) is employed in the static analysis. Subsequently, the mechanism undergoes activation using a weight pan and weights, with displacement being monitored through a Dial Gauge Indicator. The experimental setup encompasses the flexural mechanism, Dial Gauge, Weight Pan and Weights, Pulley, String, Small metal strip, and Optical Bread Board. A comparison of experimental and analytical findings reveals minimal variation, affirming the effectiveness of the flexural mechanism in delivering precise motion for high-precision applications.
Keywords
References
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DOI: https://doi.org/10.37591/joeam.v14i2.7640
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