Analysis of MEMS Electrostatic Actuator using SIMULINK Software Tool

Abstract

The study includes Micro-Electro-Mechanical System (MEMS) electrostatic actuator using SIMULINK software tool considering equivalent mathematical model. This paper deals with the equation of motion, electrostatic force for the analysis of pull in voltage and displacement of an electrostatic cantilever with respect to the changes in applied force (voltage). Considering these equation, we have developed SIMULINK model to analyze pull in voltage, and displacement for the various applied input voltage.

Keywords: MEMS, electrostatic cantilever, SIMULINK