Analysis of MEMS Electrostatic Actuator using SIMULINK Software Tool

Authors

  • Shivashankar Huddar Department of Electronics and Communication Engineering, B.V. Bhoomaraddi College of Engineering and Technology, Hubballi, Karnataka
  • B.G. Sheeparamatti Department of Electronics and Communication Engineering, Basaveshwar Engineering College, Bagalkot, Karnataka, India
  • Girija Hallikeri Department of Electronics and Communication Engineering, B. V. Bhoomaraddi College of Engineering and Technology, Hubballi, India
  • Krithika Shetty Department of Electronics and Communication Engineering, B. V. Bhoomaraddi College of Engineering and Technology, Hubballi, India
  • Pooja Patil Department of Electronics and Communication Engineering, B. V. Bhoomaraddi College of Engineering and Technology, Hubballi, India

DOI:

https://doi.org/10.37591/joiti.v5i1.4916

Abstract

The study includes Micro-Electro-Mechanical System (MEMS) electrostatic actuator using SIMULINK software tool considering equivalent mathematical model. This paper deals with the equation of motion, electrostatic force for the analysis of pull in voltage and displacement of an electrostatic cantilever with respect to the changes in applied force (voltage). Considering these equation, we have developed SIMULINK model to analyze pull in voltage, and displacement for the various applied input voltage.

Keywords: MEMS, electrostatic cantilever, SIMULINK

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Published

2021-01-06

Issue

Vol. 5 No. 1 (2015)

Section

RESEARCH ARTICLES