Simulation of Electrostatic Microactuator with Two-Sided Electrodes

Abstract

Microcantilevers are the basic MEMS structures, which can be used as both sensors and actuators. The objective of this work is to study the concept of two-way deflection of the cantilever due to applied voltage and the ground. The proposed work is carried out by using Comsol/Multiphysics software which is based on the finite element method (FEM). The proposed work is modeled and simulated by selecting electromechanics as the physics domain in the Comsol/Multiphysics software. Voltage is applied to upper and lower contact electrodes. Ground is applied to cantilever. When the voltage applied to lower contact electrode is greater than the upper contact electrode then cantilever deforms in the downward direction. When the voltage applied to upper contact electrode is greater than the lower contact electrode then cantilever deforms in the upward direction. Cantilever actuation direction depends on the magnitude of applied voltage to contact electrodes. This type of MEMS actuators can be used in microrelays.