Experimental Studies to Record the Lithographically Fabricated Microstructures by Surface Profilometry and Scanning Electron Microscopy for Microfluidic Laboratory-on-a-Chip Systems

Abstract

In this research paper, the poly(methyl methacrylate) (PMMA) microfluidic laboratory-on-a-chip system is fabricated in the cleanroom laboratory by maskless lithography, hot embossing lithography and direct bonding technique. The microstructures of the lab-on-a-chip system are measured by surface stylus profilometer. Also, the images of microstructures of lab-on-a-chip system are captured by using scanning electron microscopy (SEM). This fabricated lab-on-a-chip system is useful in bioengineering applications.