Experimental Studies to Record the Lithographically Fabricated Microstructures by Surface Profilometry and Scanning Electron Microscopy for Microfluidic Laboratory-on-a-Chip Systems

Authors

  • Subhadeep Mukhopadhyay National Institute of Technology Arunachal Pradesh, District Papum Pare, Yupia, Arunachal Pradesh, India

Keywords:

PMMA, laboratory-on-a-chip, microstructures, lithography

Abstract

In this research paper, the poly(methyl methacrylate) (PMMA) microfluidic laboratory-on-a-chip system is fabricated in the cleanroom laboratory by maskless lithography, hot embossing lithography and direct bonding technique. The microstructures of the lab-on-a-chip system are measured by surface stylus profilometer. Also, the images of microstructures of lab-on-a-chip system are captured by using scanning electron microscopy (SEM). This fabricated lab-on-a-chip system is useful in bioengineering applications.

Author Biography

  • Subhadeep Mukhopadhyay, National Institute of Technology Arunachal Pradesh, District Papum Pare, Yupia, Arunachal Pradesh, India
    Department of Electronics and Communication Engineering

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Published

2019-04-09

Issue

Vol. 4 No. 1 (2016)

Section

Articles

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