Analysis of MEMS based Micro-hot Plate for Gas Sensor

Abstract

Abstract

The Micro-hot plate is the one of the key component of the gas sensor, which is used to achieve and control the high temperature to detect the various changes occurs at the sensing layer of the sensor. In this paper, three different types of geometry of micro hot plate such as single meander, double meander and modified spiral based Micro-hot plate using two different types of materials- platinum and titanium is simulated using COMSOL Multi-physics. The dimension of the Micro-hot plate is 100