Analysis of Pull-in Voltage with Respect to Changes in Dielectric Material and their Thickness

Authors

  • Shivashankar Huddar Department of Electronics and Communication Engineering, B.V. Bhoomaraddi College of Engineering and Technology, Hubballi, Karnataka, India
  • B.G. Sheeparamatti Department of Electronics and Communication Engineering, Basaveshwar Engineering College, Bagalkot, Karnataka, India
  • Pooja Patil Department of Electronics and Communication Engineering, B.V. Bhoomaraddi College of Engineering and Technology, Hubballi, Karnataka, India
  • Girija Hallikeri Department of Electronics and Communication Engineering, B.V. Bhoomaraddi College of Engineering and Technology, Hubballi, Karnataka, India
  • Vishal Hampannavar Department of Electronics and Communication Engineering, B.V. Bhoomaraddi College of Engineering and Technology, Hubballi, Karnataka, India

DOI:

https://doi.org/10.37591/rtecs.v2i1.4917

Keywords:

MEMS, pull-in effect, mechanical restoring force, electrostatic cantilever, COMSOL

Abstract

Micro Electromechanical Systems (MEMS) actuators experience pull-in effect in their actuation range. MEMS actuating elements are thin parallel plate capacitor electrodes separated with air gap. Parallel plate electrostatic micro actuators are known to have the pull-in effect, where electrostatic attractive force exceeds the mechanical restoring force of the suspending spring, and that the movable plate spontaneously pulled into physical contact with the opposite electrode. In our model the effect of dielectric layer thickness is taken into account for predicting the pull-in voltage. The critical role of different dielectric layer materials in bringing down the static pull-in voltage is verified by using COMSOL.

 

References

Sheeparamatti Rajeshwari, Halse SV, Vinayaka Swamy KM, et al.Pull-in Voltage Study of Microcantilever Using ANSYS/Multiphysics and COMSOL/Multiphysics. J. Comp. & Math. Sci. 30 Jun 2012; 3(3): 248–421p.

MaheswaranM, Nambirajan M,Yadav Chaitanya Chandra, et al. Analysis of Pull-in Behaviour of ElectrostaticMEMS Actuators for Optical Switching Applications.JAppl Sci. 2012; 12(16): 1730-1733p.

He X, Wu Q, Wang Y, et al. Numerical Simulation andAnalysis of Electrically Actuated Microbeam-Based MEMS Capacitive Switch. Microsyst. Technol. 2009; 15: 301–307p.

Leus V and ElataD, On the dynamic response of electrostatic MEMS switches. J MicroelectromechSyst., (2008) 17:236–243p.

Nielson GN, BarbastathisG, Dyanamic Pull-in of parallel-plate and torsional Electrostatic MEMS actuators. J Micro-electromech Syst., 2006, 15:811-821.

Saucedo-Flores E, RuelasR, FloresM, et al.Study of pull-in voltage for MEMS parallel plate capacitor actuators. Proceedings of the MRS Materials society fall Meeting December 1-5 2003 Boston, A5. 86.1-A5.86.3.

Rajeshwari Sheeparamatti, HalseSV, Vinayaka SwamyKM, et al.Study of Pull-in Voltage using ANSYS & COMSOL, 9th International Workshop on Nanomechanical Sensing (NMC- 2012), IIT Bombay, Mumbai, India, June 6-8; 2012.

SiddiqueJI, An experimental investigation of the theory of electrostatic deflections, Journalof Electrostatics 2011; 69: le6.

Emmanuel Saucedo-Flores Study of the Pull-InVoltage for MEMS Parallel Plate Capacitor Actuators, MRS Materials Research SocietyFall Meeting, Boston; Dec. 1-5 2003.

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Published

2021-01-06

Issue

Vol. 2 No. 1 (2015)

Section

Research Articles