Exploration of Different Microcantilever Geometries for Thermal Sensing using COMSOL and Development of ANN Model

Abstract

In this paper, modeling and simulation results of a thermal sensor which is capable of producing increase in length and deformation with increase in temperature is analyzed. Different geometries of a microcantilever beam are accounted. Further, the simulated results are used to develop an artificial neural network (ANN) model of slotted triangular type of microcantilever. A comparative study of COMSOL and ANN results of different types of cantilever models is also presented.

Keywords: The Thermalrmal rmal sensor, MEMS, artificial neural network models

Cite this Article: Shettar Rachita, Sheeparamatti BG. Exploration of different microcantilever geometries for thermal sensing using COMSOL and Development of ANN Model. Recent Trends in Sensor Research and Technology. 2015; 2(1): 5–10p.