Design and Simulation of Microcantilevers for Sensing Applications

Authors

  • anuj kumar goel 1Department of E.C.E., M.M. University, Mullana, Haryana, India
  • Kuldip Pahwa 1Department of E.C.E., M.M. University, Mullana, Haryana, India
  • Dushyant Gupta 2Department of E.C.E., University College, Kurukshetra University, Kurukshetra, Haryana, India

Abstract

MEMS is the integration of active and passive elements on a single chip, which combines electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology is used in sensing applications with the use of basic mechanical elements such as microcantilevers, beams, diaphragms, springs, gears and so on. In this research paper, microcantilevers are used as basic elements for designing sensors. This paper shows the design and simulation of microcantilevers with static loads and respective variations in different parameters.

Keywords: MEMS, microcantilevers, actuation, sensing

Cite this ArticleAnuj Kumal Goel, Kuldip Pahwa, Dushyant Gupta. Design and Simulation of Microcantilevers for Sensing Applications. Recent Trends in Sensor Research and Technology. 2016; 3(1): 21–24p.

Downloads

Published

2016-06-03

Issue

Vol. 3 No. 1 (2016)

Section

Review Articles