Mathematical Design and Simulation of MEMS based Acoustic Sensor

Abstract

This paperfocuses on design and simulation of MEMS Acoustic Sensor based on piezoelectriczinc oxide (ZnO) thin film using single crystal silicon wafer. The thickness ofsilicon diaphragm is 35  and the size of diaphragm is 3mm *3mm. Thepaper provides analysis and exhibit enhanced resonance frequency 51.058 KHz.