High Reflectivity Semiconductor-glass Grating Structure for SOI Application

Abstract

Abstract

High reflectance of semiconductor-glass (GaAs-BSG, InP-FS, GaAs-FS, Ge-BK7, Ge-BSG) grating SOI structure at wavelength 1.55 µm is thoroughly investigated in this paper. Simulation result showed that, reflectivities are 99.01, 99.03, 99.20, 99.29 and 99.47% at wavelength 1.55 µm for GaAs-BSG, InP-FS, GaAs-FS, Ge-BK7, Ge-BSG grating SOI structure, respectively. This simulation is carried out using plane wave expansion method. Present simulation gives effective result as compared to existing result.

Keywords: semiconductor-glass grating, reflectance, plane wave expansion method